- Glove box for the production of organic semiconductor devices
- High vacuum evaporation system
- Sputtering system
- Semiconductor measuring station for wafers up to 200mm diameter
- Parameter measuring station for characterization of electronic components
- AFM (Atomic Force Microscope)
- Layer thickness gauge
- Circuit simulator PSpice for development, modeling and simulation of analog circuits.
- Device simulator Atlas
- usual equipment with PCs, workstations and laboratory measuring instruments
Letzte Änderung: 15. March 2021